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Alpha Step IQ Contact versus Surfscan 6420 Unpatterned Surface

KLA Alpha Step IQ Contact and KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Alpha Step IQ ContactKLA
Surfscan 6420 Unpatterned SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA Alpha Step IQ ContactKLA Surfscan 6420
Specifications
Phase—1 phase[1]
Frequency—60 Hz[1]
Voltage—208V[1]
Configuration—16A[1]
Alpha Step IQ Contact entrySurfscan 6420 Unpatterned Surface entry

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing