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Archer 500 Overlay Metrology versus UV 1280 SE Thin Film Thickness Measurement

KLA Archer 500 Overlay Metrology and KLA UV 1280 SE Thin Film Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Archer 500 Overlay MetrologyKLA
UV 1280 SE Thin Film Thickness MeasurementKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA ArcherKLA UV 1280 SE Thin Film Thickness Measurement
Cited variants
  • KLA Archer 500 Overlay Metrology System - Without HDD[1]
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Specifications
ConfigurationWithout HDD[1]Single phase[2]
Voltage—200 V[2]
Power—1.8 kW[2]
Archer 500 Overlay Metrology entryUV 1280 SE Thin Film Thickness Measurement entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing