Comparison ledger
KLA Archer XT+ Overlay Measurement and KLA Starlight 301 300 SL Inspection Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Archer | KLA Starlight 301 300 SL Inspection Measurement |
| Specifications | ||
| Software version | 5.60[1] | — |
| Configuration | New / Refurbished Items:[1] | 50/60 Hz[2] |
| New system consumable parts | Shutter, HLS Lamp & Air Filters[1] | — |
| Voltage | — | 208 Vac[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →