Comparison ledger
KLA Archer XT+ Overlay Measurement and KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Archer | KLA Surfscan 6420 |
| Specifications | ||
| Software version | 5.60[1] | — |
| Configuration | New / Refurbished Items:[1] | 16A[2] |
| New system consumable parts | Shutter, HLS Lamp & Air Filters[1] | — |
| Phase | — | 1 phase[2] |
| Frequency | — | 60 Hz[2] |
| Voltage | — | 208V[2] |
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