Comparison ledger
KLA Candela CS 10 R Wafer Inspector and KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Candela CS 10 | KLA Surfscan 6420 |
| Specifications | ||
| Configuration | 50/60 Hz[1] | 16A[2] |
| Phase | — | 1 phase[2] |
| Frequency | — | 60 Hz[2] |
| Voltage | — | 208V[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →