Waferpedia

Comparison ledger

Candela CS 20 Surface versus ILM 2139 Patterned Wafer

KLA Candela CS 20 Surface and KLA ILM 2139 Patterned Wafer, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Candela CS 20 SurfaceKLA
ILM 2139 Patterned WaferKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA Candela CS 20KLA ILM 2139 Patterned Wafer
Specifications
Voltage230V; 6 Amps[1]208 V[2]
Phase50/60Hz; Phase 1[1]3 phase[2]
Configuration—50/60 Hz[2]
Candela CS 20 Surface entryILM 2139 Patterned Wafer entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing