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Comparison ledger

Candela CS 20 Surface versus INS 3000 DUV Defect

KLA Candela CS 20 Surface and KLA INS 3000 DUV Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Candela CS 20 SurfaceKLA
INS 3000 DUV DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Wafer transport check
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA Candela CS 20KLA INS 3000
Specifications
Voltage230V; 6 Amps[1]—
Phase50/60Hz; Phase 1[1]—
Wafer size—Wafer transport check[2]
Configuration—Auto Focus check for each lens[2]
Stage—Slight left-to-right tilt observed; minor scratches present[2]
Candela CS 20 Surface entryINS 3000 DUV Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing