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eS 32 E-Beam versus MicroSense UMSC 200 BT Measurement

KLA eS 32 E-Beam and KLA MicroSense UMSC 200 BT Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
eS 32 E-BeamKLA
MicroSense UMSC 200 BT MeasurementKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA eS 32 E-BeamKLA MicroSense
Specifications
Configuration12"[1]10 A[2]
Voltage—120 V[2]
Main Air Pressure—50 PSI[2]
Stage Air Pressure—5 Psi[2]
Measurement Type—Flatness & Thickness[2]
System Type—Non-contact Measurement[2]
eS 32 E-Beam entryMicroSense UMSC 200 BT Measurement entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing