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FLX 2320 A versus MicroSense UMSC 200 BT Measurement

KLA FLX 2320 A and KLA MicroSense UMSC 200 BT Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
FLX 2320 AKLA
MicroSense UMSC 200 BT MeasurementKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA FLX 2320KLA MicroSense
Specifications
ConfigurationThin film stress measurement system[1]10 A[2]
Voltage—120 V[2]
Main Air Pressure—50 PSI[2]
Stage Air Pressure—5 Psi[2]
Measurement Type—Flatness & Thickness[2]
System Type—Non-contact Measurement[2]
FLX 2320 A entryMicroSense UMSC 200 BT Measurement entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing