Waferpedia

Comparison ledger

FLX 2320 A versus P 10

KLA FLX 2320 A and KLA P 10, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
FLX 2320 AKLA
P 10KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA FLX 2320KLA P
Specifications
ConfigurationThin film stress measurement system[1]2A[2]
Phase—1 Phase[2]
Frequency—50 Hz[2]
Voltage—220V[2]
FLX 2320 A entryP 10 entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing