Waferpedia

Comparison ledger

FLX 2320 A versus P/N: 0224471-001 or 365998 30mW Ar

KLA FLX 2320 A and KLA P/N: 0224471-001 or 365998 30mW Ar, side by side. Every value shown is drawn from its cited encyclopedia entry.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
FLX 2320 AKLA
P/N: 0224471-001 or 365998 30mW ArKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA FLX 2320KLA P/N: 0224471-001 or 365998 30mW Ar
Specifications
ConfigurationThin film stress measurement system[1]Compatible with KLA 6200, 6220, 6400 and 6420[2]
JDSU/Lumentum P/N—2214-30SLQTA[2]
FLX 2320 A entryP/N: 0224471-001 or 365998 30mW Ar entry

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing