Waferpedia

Comparison ledger

HRP 340 Thickness Measurement versus ILM 2139 Patterned Wafer

KLA HRP 340 Thickness Measurement and KLA ILM 2139 Patterned Wafer, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA HRP 340KLA ILM 2139 Patterned Wafer
Specifications
Configuration50/60 Hz[1]50/60 Hz[2]
Phase1 Phase / 3 Wires[1]3 phase[2]
Voltage208 V[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing