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HRP 340 Thickness Measurement versus MicroSense UMSC 200 BT Measurement

KLA HRP 340 Thickness Measurement and KLA MicroSense UMSC 200 BT Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
HRP 340 Thickness MeasurementKLA
MicroSense UMSC 200 BT MeasurementKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA HRP 340KLA MicroSense
Specifications
Configuration50/60 Hz[1]10 A[2]
Phase1 Phase / 3 Wires[1]—
Voltage—120 V[2]
Main Air Pressure—50 PSI[2]
Stage Air Pressure—5 Psi[2]
Measurement Type—Flatness & Thickness[2]
System Type—Non-contact Measurement[2]
HRP 340 Thickness Measurement entryMicroSense UMSC 200 BT Measurement entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing