Waferpedia

Comparison ledger

HRP 340 Thickness Measurement versus P/N: 0023889-00 Wafer Vacuum Chuck

KLA HRP 340 Thickness Measurement and KLA P/N: 0023889-00 Wafer Vacuum Chuck, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
HRP 340 Thickness MeasurementKLA
P/N: 0023889-00 Wafer Vacuum ChuckKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—150mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA HRP 340KLA P/N: 0023889-00 Wafer Vacuum Chuck
Specifications
Configuration50/60 Hz[1]Compatible with KLA SP1 Classic // SP1-TBi //SP1-DLS[2]
Phase1 Phase / 3 Wires[1]—
Wafer size—150mm / 200mm Wafer Vacuum Chuck[2]
HRP 340 Thickness Measurement entryP/N: 0023889-00 Wafer Vacuum Chuck entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing