Waferpedia

Comparison ledger

HRP 340 Thickness Measurement versus PN 159336 Below Wafer Detector Assy

KLA HRP 340 Thickness Measurement and KLA PN 159336 Below Wafer Detector Assy, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
HRP 340 Thickness MeasurementKLA
PN 159336 Below Wafer Detector AssyKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA HRP 340KLA PN 159336 Below Wafer Detector Assy
Specifications
Configuration50/60 Hz[1]Compatible on the KLA 6400 and KLA 6420[2]
Phase1 Phase / 3 Wires[1]—
HRP 340 Thickness Measurement entryPN 159336 Below Wafer Detector Assy entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing