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ICOS CI 9450 versus Prometrix UV 1250 SE Film Thickness Measurement

KLA ICOS CI 9450 and KLA Prometrix UV 1250 SE Film Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA ICOSKLA UV 1250 SE
Specifications
Configuration9x50[1]120 Volt[2]
Phase1 Phase[2]
Software Version2.4[2]
Robot TypeKLA H2D[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing