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ICOS CI 9450 versus Surfscan 6420 Unpatterned Surface

KLA ICOS CI 9450 and KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
ICOS CI 9450KLA
Surfscan 6420 Unpatterned SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA ICOSKLA Surfscan 6420
Specifications
Configuration9x50[1]16A[2]
Phase—1 phase[2]
Frequency—60 Hz[2]
Voltage—208V[2]
ICOS CI 9450 entrySurfscan 6420 Unpatterned Surface entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing