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ILM 2139 Patterned Wafer versus INS 3000 DUV Defect

KLA ILM 2139 Patterned Wafer and KLA INS 3000 DUV Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
ILM 2139 Patterned WaferKLA
INS 3000 DUV DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Wafer transport check
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA ILM 2139 Patterned WaferKLA INS 3000
Specifications
Configuration50/60 Hz[1]Auto Focus check for each lens[2]
Voltage208 V[1]—
Phase3 phase[1]—
Wafer size—Wafer transport check[2]
Stage—Slight left-to-right tilt observed; minor scratches present[2]
ILM 2139 Patterned Wafer entryINS 3000 DUV Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing