Waferpedia

Comparison ledger

ILM 2139 Patterned Wafer versus P 16 Surface

KLA ILM 2139 Patterned Wafer and KLA P 16 Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
ILM 2139 Patterned WaferKLA
P 16 SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA ILM 2139 Patterned WaferKLA P
Specifications
Configuration50/60 Hz[1]Windows XP[2]
Voltage208 V[1]—
Phase3 phase[1]—
ILM 2139 Patterned Wafer entryP 16 Surface entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing