Waferpedia

Comparison ledger

ILM 2139 Patterned Wafer versus PN 159336 Below Wafer Detector Assy

KLA ILM 2139 Patterned Wafer and KLA PN 159336 Below Wafer Detector Assy, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
ILM 2139 Patterned WaferKLA
PN 159336 Below Wafer Detector AssyKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA ILM 2139 Patterned WaferKLA PN 159336 Below Wafer Detector Assy
Specifications
Configuration50/60 Hz[1]Compatible on the KLA 6400 and KLA 6420[2]
Voltage208 V[1]—
Phase3 phase[1]—
ILM 2139 Patterned Wafer entryPN 159336 Below Wafer Detector Assy entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing