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ILM 2139 Patterned Wafer versus Prometrix UV 1250 SE Film Thickness Measurement

KLA ILM 2139 Patterned Wafer and KLA Prometrix UV 1250 SE Film Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
ILM 2139 Patterned WaferKLA
Prometrix UV 1250 SE Film Thickness MeasurementKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA ILM 2139 Patterned WaferKLA UV 1250 SE
Specifications
Configuration50/60 Hz[1]120 Volt[2]
Voltage208 V[1]—
Phase3 phase[1]1 Phase[2]
Software Version—2.4[2]
Robot Type—KLA H2D[2]
ILM 2139 Patterned Wafer entryPrometrix UV 1250 SE Film Thickness Measurement entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing