Waferpedia

Comparison ledger

ILM 2139 Patterned Wafer versus Solid State

KLA ILM 2139 Patterned Wafer and KLA Solid State, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
ILM 2139 Patterned WaferKLA
Solid StateKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA ILM 2139 Patterned WaferKLA Solid State
Specifications
Configuration50/60 Hz[1]Upgrade for KLA AIT II & XP Series Systems[2]
Voltage208 V[1]—
Phase3 phase[1]—
ILM 2139 Patterned Wafer entrySolid State entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing