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Comparison ledger

ILM 2139 Patterned Wafer versus Surfscan 6420 Unpatterned Surface

KLA ILM 2139 Patterned Wafer and KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
ILM 2139 Patterned WaferKLA
Surfscan 6420 Unpatterned SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA ILM 2139 Patterned WaferKLA Surfscan 6420
Specifications
Configuration50/60 Hz[1]16A[2]
Voltage208 V[1]208V[2]
Phase3 phase[1]1 phase[2]
Frequency—60 Hz[2]
ILM 2139 Patterned Wafer entrySurfscan 6420 Unpatterned Surface entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing