Comparison ledger
KLA ILM 2139 Patterned Wafer and KLA Tera Stay SLF 27 Reticle, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA ILM 2139 Patterned Wafer | KLA SLF |
| Specifications | ||
| Configuration | 50/60 Hz[1] | 1 Reticle loader[2] |
| Voltage | 208 V[1] | — |
| Phase | 3 phase[1] | — |
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