Waferpedia

Comparison ledger

ILM 2139 Patterned Wafer versus UV 1280 SE Thin Film Thickness Measurement

KLA ILM 2139 Patterned Wafer and KLA UV 1280 SE Thin Film Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
ILM 2139 Patterned WaferKLA
UV 1280 SE Thin Film Thickness MeasurementKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA ILM 2139 Patterned WaferKLA UV 1280 SE Thin Film Thickness Measurement
Specifications
Configuration50/60 Hz[1]Single phase[2]
Voltage208 V[1]200 V[2]
Phase3 phase[1]—
Power—1.8 kW[2]
ILM 2139 Patterned Wafer entryUV 1280 SE Thin Film Thickness Measurement entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing