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Comparison ledger

INS 3000 DUV Defect versus P/N: 39 0181 Lamp, Xenon

KLA INS 3000 DUV Defect and KLA P/N: 39 0181 Lamp, Xenon, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
INS 3000 DUV DefectKLA
P/N: 39 0181 Lamp, XenonKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer sizeWafer transport check—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA INS 3000KLA P/N: 39 0181 Lamp, Xenon
Specifications
Wafer sizeWafer transport check[1]—
ConfigurationAuto Focus check for each lens[1]Standard[2]
StageSlight left-to-right tilt observed; minor scratches present[1]—
INS 3000 DUV Defect entryP/N: 39 0181 Lamp, Xenon entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing