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Comparison ledger

INS 3000 DUV Defect versus P/N: 571024 75mW Ar

KLA INS 3000 DUV Defect and KLA P/N: 571024 75mW Ar, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
INS 3000 DUV DefectKLA
P/N: 571024 75mW ArKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer sizeWafer transport check—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA INS 3000KLA P/N: 571024 75mW Ar
Specifications
Wafer sizeWafer transport check[1]—
ConfigurationAuto Focus check for each lens[1]Compatible with KLA SP1-DLS[2]
StageSlight left-to-right tilt observed; minor scratches present[1]—
JDSU/Lumentum P/N—2213-75SLT[2]
Spectra-Physics P/N—185P-F1209[2]
INS 3000 DUV Defect entryP/N: 571024 75mW Ar entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing