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INS 3000 DUV Defect versus Prometrix UV 1250 SE Film Thickness Measurement

KLA INS 3000 DUV Defect and KLA Prometrix UV 1250 SE Film Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
INS 3000 DUV DefectKLA
Prometrix UV 1250 SE Film Thickness MeasurementKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer sizeWafer transport check—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA INS 3000KLA UV 1250 SE
Specifications
Wafer sizeWafer transport check[1]—
ConfigurationAuto Focus check for each lens[1]120 Volt[2]
StageSlight left-to-right tilt observed; minor scratches present[1]—
Phase—1 Phase[2]
Software Version—2.4[2]
Robot Type—KLA H2D[2]
INS 3000 DUV Defect entryPrometrix UV 1250 SE Film Thickness Measurement entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing