Waferpedia

Comparison ledger

INS 3000 DUV Defect versus Puma 9120 Darkfield Defect

KLA INS 3000 DUV Defect and KLA Puma 9120 Darkfield Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
INS 3000 DUV DefectKLA
Puma 9120 Darkfield DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer sizeWafer transport check—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA INS 3000KLA Puma 9120
Specifications
Wafer sizeWafer transport check[1]—
ConfigurationAuto Focus check for each lens[1]Refurbished[2]
StageSlight left-to-right tilt observed; minor scratches present[1]—
INS 3000 DUV Defect entryPuma 9120 Darkfield Defect entry

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing