Waferpedia

Comparison ledger

INS 3000 DUV Defect versus Solid State

KLA INS 3000 DUV Defect and KLA Solid State, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
INS 3000 DUV DefectKLA
Solid StateKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer sizeWafer transport check—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA INS 3000KLA Solid State
Specifications
Wafer sizeWafer transport check[1]—
ConfigurationAuto Focus check for each lens[1]Upgrade for KLA AIT II & XP Series Systems[2]
StageSlight left-to-right tilt observed; minor scratches present[1]—
INS 3000 DUV Defect entrySolid State entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing