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Comparison ledger

INS 3000 DUV Defect versus Surfscan 6420 Unpatterned Surface

KLA INS 3000 DUV Defect and KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
INS 3000 DUV DefectKLA
Surfscan 6420 Unpatterned SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer sizeWafer transport check—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA INS 3000KLA Surfscan 6420
Specifications
Wafer sizeWafer transport check[1]—
ConfigurationAuto Focus check for each lens[1]16A[2]
StageSlight left-to-right tilt observed; minor scratches present[1]—
Phase—1 phase[2]
Frequency—60 Hz[2]
Voltage—208V[2]
INS 3000 DUV Defect entrySurfscan 6420 Unpatterned Surface entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing