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Comparison ledger

INS 3000 DUV Defect versus Surfscan SP 5 Particle Defect

KLA INS 3000 DUV Defect and KLA Surfscan SP 5 Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
INS 3000 DUV DefectKLA
Surfscan SP 5 Particle DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer sizeWafer transport checkBare Wafer Inspection Station
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA INS 3000KLA Surfscan
Specifications
Wafer sizeWafer transport check[1]Bare Wafer Inspection Station[2]
ConfigurationAuto Focus check for each lens[1]Integrated Console[2]
StageSlight left-to-right tilt observed; minor scratches present[1]—
INS 3000 DUV Defect entrySurfscan SP 5 Particle Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing