Comparison ledger
KLA INS 3000 DUV Defect and KLA Tera Stay SLF 27 Reticle, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Wafer transport check | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA INS 3000 | KLA SLF |
| Specifications | ||
| Wafer size | Wafer transport check[1] | — |
| Configuration | Auto Focus check for each lens[1] | 1 Reticle loader[2] |
| Stage | Slight left-to-right tilt observed; minor scratches present[1] | — |
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