Comparison ledger
KLA Inspex Eagle, Tenney , TPS JR-A-F4T Junior compact temperature test chambers, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Inspex EagleKLA | |
|---|---|---|
| OEM | KLA | Tenney |
| Category | Test & Probe | Test & Probe |
| Wafer size | 8" | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Inspex Eagle | Tenney , TPS JR-A-F4T Junior compact temperature test chambers |
| Specifications | ||
| Configuration | Chuck, 6”[1] | — |
| Wafer size | Wafer capability 4” up to 8"[1] | — |
| Chuck | 6"[1] | — |
| Prealigner | 6"[1] | — |
| Wafer capability | 4" up to 8"[1] | — |
| Wafer handling | Cassette to cassette[1] | — |
| Ports | 2[1] | — |
| Microscope | Zeiss Microscope[1] | — |
| Manuals | Including manuals[1] | — |
| Inspection type | Patterned Wafer Laser Inspection[2] | — |
| Chamber Size | — | 1.2 cubic feet[3] |
| Temperature Range | — | -68°C to +180°C[3] |
| Control | — | +/-1.0°C[3] |
| Manufacturer | — | Tenney[3] |
| Model | — | JR-A-F4T[3] |
| Short description | — | Junior compact temperature test chambers[3] |
| Control accuracy | — | +/-1.0°C[3] |
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