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MicroSense UMSC 200 BT Measurement versus P 10

KLA MicroSense UMSC 200 BT Measurement and KLA P 10, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
MicroSense UMSC 200 BT MeasurementKLA
P 10KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA MicroSenseKLA P
Specifications
Configuration10 A[1]2A[2]
Voltage120 V[1]220V[2]
Main Air Pressure50 PSI[1]—
Stage Air Pressure5 Psi[1]—
Measurement TypeFlatness & Thickness[1]—
System TypeNon-contact Measurement[1]—
Phase—1 Phase[2]
Frequency—50 Hz[2]
MicroSense UMSC 200 BT Measurement entryP 10 entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing