Waferpedia

Comparison ledger

P 10 versus P/N: 0224471-001 or 365998 30mW Ar

KLA P 10 and KLA P/N: 0224471-001 or 365998 30mW Ar, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
P 10KLA
P/N: 0224471-001 or 365998 30mW ArKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA PKLA P/N: 0224471-001 or 365998 30mW Ar
Specifications
Phase1 Phase[1]—
Frequency50 Hz[1]—
Configuration2A[1]Compatible with KLA 6200, 6220, 6400 and 6420[2]
Voltage220V[1]—
JDSU/Lumentum P/N—2214-30SLQTA[2]
P 10 entryP/N: 0224471-001 or 365998 30mW Ar entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing