Waferpedia

Comparison ledger

P 10 versus Starlight 301 300 SL Inspection Measurement

KLA P 10 and KLA Starlight 301 300 SL Inspection Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
P 10KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA PKLA Starlight 301 300 SL Inspection Measurement
Specifications
Phase1 Phase[1]
Frequency50 Hz[1]
Configuration2A[1]50/60 Hz[2]
Voltage220V[1]208 Vac[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing