Waferpedia

Comparison ledger

P 15 XP Surface versus P/N: 0224471-001 or 365998 30mW Ar

KLA P 15 XP Surface and KLA P/N: 0224471-001 or 365998 30mW Ar, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA PKLA P/N: 0224471-001 or 365998 30mW Ar
Specifications
ConfigurationUpgraded from P-10[1]Compatible with KLA 6200, 6220, 6400 and 6420[2]
JDSU/Lumentum P/N2214-30SLQTA[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing