Comparison ledger
KLA P 17 Surface and KLA P-2, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P 17 SurfaceKLA | P-2KLA |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P | KLA P-2 |
| Specifications | ||
| Phase | 1 Phase[1] | — |
| Configuration | 50/60 Hz[1] | — |
| Model | — | P-2[3] |
| OEM | — | KLA Tencor[3] |
| Equipment type | — | Profilometer[3] |
| Sample table | — | 200 mm sample table with vacuum[4] |
| Measurement range | — | Measures steps from 100 Å to 300 µm[4] |
| Maximum sample thickness | — | 20 mm[4] |
| Minimum sample length | — | 25 mm[4] |
| Feature | — | 3D scan option[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →