Comparison ledger
KLA P 17 Surface and KLA P 22 Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P 17 SurfaceKLA | P 22 SurfaceKLA |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P | KLA P |
| Specifications | ||
| Phase | 1 Phase[1] | — |
| Configuration | 50/60 Hz[1] | UPI Board Only[3] |
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