Comparison ledger
KLA P-2, KLA P 22 H Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P-2KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | Automated Wafer Handler |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P-2 | KLA P |
| Specifications | ||
| Model | P-2[1] | — |
| OEM | KLA Tencor[1] | — |
| Equipment type | Profilometer[1] | Surface profilometer[4] |
| Sample table | 200 mm sample table with vacuum[2] | — |
| Measurement range | Measures steps from 100 Å to 300 µm[2] | — |
| Maximum sample thickness | 20 mm[2] | 21 mm[4] |
| Minimum sample length | 25 mm[2] | — |
| Feature | 3D scan option[2] | — |
| Wafer size | 200mm[3] | Automated Wafer Handler[4] |
| 3D scan option | Yes[2] | — |
| Configuration | — | Step Height Precision Micro 2D Scanner[4] |
| Scan Length | — | 60 mm[4] |
| Scan Speed | — | 1 um/sec to 25mm/ sec[4] |
| Scan Method | — | Bi-directional moving stylus[4] |
| Sampling Rate | — | 5, 10, 20, 50, 100, 200, 500 , 1000 Hz[4] |
| Stylus Force | — | Adjustable between 0.05 ~ 50mg[4] |
| Step Height Repeatability, 1 | — | 0.75 nm or 0.1%:Sample Handling:[4] |
| Theta | — | 360[4] |
| Optics | — | Dual View Optics[4] |
| Stage | — | Motorized precision 200mm Diameter X-Y vacuum sample stage[4] |
| Stylus | — | 2 um Radius 60[4] |
| Operating system | — | Window based Operation system[4] |
| Monitor | — | LCD Monitor[4] |
| Vertical Range / Resolution | — | +,- 13um/0.0075A +,-65um/0.04A 327um/0.19A[4] |
| Step Height Repeatability | — | 0.75 nm or 0.1%[4] |
| Theta rotation | — | 360[4] |
| Maximum sample weight | — | 1 Kg[4] |
| Automated Wafer Handler | — | 1 open loadport for 200mm and 150mm[4] |
| Data Screen | — | display scan, roughness, data summary table listing up to 27 parameters ( total 48 )[4] |
| Database Manager | — | Save & Retrieve data[4] |
| ASCII Output | — | Scan data is exportable to commercial spreadsheet programs[4] |
| Data Output | — | Data Screen (display scan, roughness, data summary table listing up to 27 parameters total 48), Database Manager, ASCII Output[4] |
| Performance | — | Step Height Precision Micro 2D Scanner[5] |
| Data output | — | Data Screen, Database Manager, ASCII Output[4] |
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