Comparison ledger
KLA P 22 H Surface and KLA Puma 9130 Darkfield Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P | KLA Puma 9130 |
| Specifications | ||
| Configuration | Step Height Precision Micro 2D Scanner[1] | Refurbished[2] |
| Scan Length | 60 mm[1] | — |
| Scan Speed | 1 um/sec to 25mm/ sec[1] | — |
| Scan Method | Bi-directional moving stylus[1] | — |
| Sampling Rate | 5, 10, 20, 50, 100, 200, 500 , 1000 Hz[1] | — |
| Stylus Force | Adjustable between 0.05 ~ 50mg[1] | — |
| Step Height Repeatability, 1 | 0.75 nm or 0.1%:Sample Handling:[1] | — |
| Theta | 360[1] | — |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →