Waferpedia

Comparison ledger

P 22 Surface versus Surfscan 6420 Unpatterned Surface

KLA P 22 Surface and KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
P 22 SurfaceKLA
Surfscan 6420 Unpatterned SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA PKLA Surfscan 6420
Specifications
ConfigurationUPI Board Only[1]16A[2]
Phase—1 phase[2]
Frequency—60 Hz[2]
Voltage—208V[2]
P 22 Surface entrySurfscan 6420 Unpatterned Surface entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing