Waferpedia

Comparison ledger

P 22 SurfaceversusSurfscan SP 5 Particle Defect

KLA P 22 Surface, KLA Surfscan SP 5 Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
P 22 SurfaceKLA
Surfscan SP 5 Particle DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Bare Wafer Inspection Station
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA PKLA Surfscan
Specifications
ConfigurationUPI Board Only[1]Integrated Console[3]
ManufacturerKLA[1]—
ModelP 22 Surface[2]—
Equipment typesurface profilometer[1]Bare Wafer Inspection Station[3]
CategoryMetrology & Inspection[1]Metrology & Inspection[4]
Wafer size—Bare Wafer Inspection Station[4]
P 22 Surface entrySurfscan SP 5 Particle Defect entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com