Comparison ledger
KLA P/N: 0023889-00 Wafer Vacuum Chuck and KLA P/N: 571024 75mW Ar, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 150mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P/N: 0023889-00 Wafer Vacuum Chuck | KLA P/N: 571024 75mW Ar |
| Specifications | ||
| Configuration | Compatible with KLA SP1 Classic // SP1-TBi //SP1-DLS[1] | Compatible with KLA SP1-DLS[2] |
| Wafer size | 150mm / 200mm Wafer Vacuum Chuck[1] | — |
| JDSU/Lumentum P/N | — | 2213-75SLT[2] |
| Spectra-Physics P/N | — | 185P-F1209[2] |
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