Waferpedia

Comparison ledger

P/N: 0023889-00 Wafer Vacuum Chuck versus RS 75 Resistivity Mapper

KLA P/N: 0023889-00 Wafer Vacuum Chuck and KLA RS 75 Resistivity Mapper, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
P/N: 0023889-00 Wafer Vacuum ChuckKLA
RS 75 Resistivity MapperKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size150mm—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA P/N: 0023889-00 Wafer Vacuum ChuckKLA RS 75
Specifications
ConfigurationCompatible with KLA SP1 Classic // SP1-TBi //SP1-DLS[1]220 Volts[2]
Wafer size150mm / 200mm Wafer Vacuum Chuck[1]—
Voltage—120 V[3]
P/N: 0023889-00 Wafer Vacuum Chuck entryRS 75 Resistivity Mapper entry

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing