Comparison ledger
KLA P/N: 0023889-00 Wafer Vacuum Chuck and KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 150mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P/N: 0023889-00 Wafer Vacuum Chuck | KLA Surfscan 6420 |
| Specifications | ||
| Configuration | Compatible with KLA SP1 Classic // SP1-TBi //SP1-DLS[1] | 16A[2] |
| Wafer size | 150mm / 200mm Wafer Vacuum Chuck[1] | — |
| Phase | — | 1 phase[2] |
| Frequency | — | 60 Hz[2] |
| Voltage | — | 208V[2] |
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