Waferpedia

Comparison ledger

P/N: 0224471-001 or 365998 30mW Ar versus P/N: 39 0181 Lamp, Xenon

KLA P/N: 0224471-001 or 365998 30mW Ar and KLA P/N: 39 0181 Lamp, Xenon, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA P/N: 0224471-001 or 365998 30mW ArKLA P/N: 39 0181 Lamp, Xenon
Specifications
ConfigurationCompatible with KLA 6200, 6220, 6400 and 6420[1]Standard[2]
JDSU/Lumentum P/N2214-30SLQTA[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing