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Comparison ledger

P/N: 571024 75mW Ar versus Surfscan SP 5 Particle Defect

KLA P/N: 571024 75mW Ar and KLA Surfscan SP 5 Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
P/N: 571024 75mW ArKLA
Surfscan SP 5 Particle DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Bare Wafer Inspection Station
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA P/N: 571024 75mW ArKLA Surfscan
Specifications
ConfigurationCompatible with KLA SP1-DLS[1]Integrated Console[2]
JDSU/Lumentum P/N2213-75SLT[1]—
Spectra-Physics P/N185P-F1209[1]—
Wafer size—Bare Wafer Inspection Station[2]
P/N: 571024 75mW Ar entrySurfscan SP 5 Particle Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing