Waferpedia

Comparison ledger

PN 159336 Below Wafer Detector Assy versus Puma 9120 Darkfield Defect

KLA PN 159336 Below Wafer Detector Assy and KLA Puma 9120 Darkfield Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
PN 159336 Below Wafer Detector AssyKLA
Puma 9120 Darkfield DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA PN 159336 Below Wafer Detector AssyKLA Puma 9120
Specifications
ConfigurationCompatible on the KLA 6400 and KLA 6420[1]Refurbished[2]
PN 159336 Below Wafer Detector Assy entryPuma 9120 Darkfield Defect entry

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing